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Please use this identifier to cite or link to this item: http://tustr.lib.tust.edu.tw:8080/ir/handle/987654321/1102

Title: Studies of Novel Copolymers for Deep-UV Photoresists. I. Synthesis and Properties of Poly(Styrene-co-Silicon-containing maleimide)
Authors: 疏偉傑
Shu, Wei-Jye
Date: 2006-07
Issue Date: 2014-12-26 14:59:21 (UTC+8)
Abstract: Soluble copolymers of trimethyl (4-(N-maleimido) phenoxy) silane (TMMS) with styrene-series monomers were synthesized by radical polymerization in toluene at 70 C using 2, 20-azobisisobutyronitrile (AIBN) as initiator. The comonomer reactivity ratios were calculated by the conventional Fineman-Ross and Kelen-Tu¨dos methods and a nonlinear least-squares Tidwell-Mortimer method. The glass transition temperatures (Tgs) and thermal degradation of copolymers were determined by differential scanning calorimetric (DSC) and thermo-gravimetric analysis (TGA) methods, respectively. The comonomer reactivity ratio of TMMS with styrene was changed from a alternating to middle type between alternating and ideal copolymerization for the side-chain of TMMS and the deactivators of styrene. The curves of Tgs versus the different compositions of the above synthesized styrene-maleimide copolymers matched the modified Johnston’s equation as increasing the affect of weight ratio on alternating-segment, and exhibited an S-shaped curve of deviation in comparison with the Fox’s equation. The maleimide-segments and styrene-segments within these copolymers were completely compatible and the thermal stability and flame retardancy of polystyrene could be enhanced simultaneously via the introduction of silicon-containing maleimide.
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